Line edge roughness, or LER, is defined as a deviation of a feature edge from an ideal shape. Semiconductor features are not perfectly smooth. LER describes the amount of variation on the edges of ...
As previously discussed, shot noise is an important contributor to line edge roughness. However, as the title of one paper on the subject put it, “Do not always blame the photons.” The line edge ...
Nothing brings scientists together like the possibility of better, more versatile research. Case in point: seeing the need for a new instrument that will accelerate research at one of the world’s most ...
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