Extreme ultraviolet lithography - Wikipedia
It is a type of photolithography that uses 13.5 nm extreme ultraviolet (EUV) light from a laser-pulsed tin (Sn) plasma to create intricate patterns on semiconductor substrates.
EUV lithography systems – Products | ASML
EUV lithography is important because it makes scaling more affordable for chipmakers and allows the semiconductor industry to continue its pursuit of Moore’s Law. EUV systems are used to print the …
Extreme ultraviolet lithography - Nature Reviews Methods Primers
Nov 28, 2024 · Extreme ultraviolet (EUV) lithography is used to fabricate features with nanometre-scale resolution.
EUV lithography and technology | ZEISS SMT
EUV stands for "extreme ultraviolet" light. The light visible to humans has wavelengths between 400 and 800 nanometers. The range of ultraviolet light begins below 400 nanometers. The leading lithography …
ASML and the High-NA EUV Monopoly: The Path to 1.4nm
4 days ago · Summary of the Angstrom Era The successful commercialization of High-NA EUV by ASML marks a definitive end to the "nanometer" era and the beginning of the "Angstrom" era. By …
The Case for High NA EUV: Unlocking the Next Era of Chip …
3 days ago · Imec and its ecosystem partners are pushing the boundaries of High NA EUV lithography and patterning.
Molecular Contamination: The Hardware Reality of High-NA EUV
Jan 28, 2026 · Keeping next-gen High-NA EUV chipmaking machines clean of molecular contamination is a massive hardware and materials science challenge.
EUV Lithography: How It Works and Why It’s Essential for Electronics ...
Sep 2, 2025 · EUV lithography is a cornerstone of modern semiconductor manufacturing, allowing the production of microchips that are smaller, faster, and more efficient than their predecessors.
EUV Lithography: Future of Semiconductor Manufacturing
Jul 16, 2025 · Extreme Ultraviolet (EUV) lithography represents a significant leap forward in semiconductor manufacturing. By using a 13.5 nm wavelength light source, EUV enables the …
Understanding EUV and DUV Why These Ultraviolet Wavelengths …
Nov 20, 2025 · Extreme Ultraviolet EUV and Deep Ultraviolet DUV light sit in one of the most important regions of the optical spectrum for semiconductor manufacturing, metrology, and advanced research.